Introduction to Microfabrication

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This fully revised and updated text provides a comprehensive overview of fabrication technologies and materials essential for modern microdevices. It illustrates the application of common microfabrication principles across various devices, from nanometer probe tips to meter-scale solar cells, including microelectronic, mechanical, optical, and fluidic devices. Key topics include the latest advancements in wafer engineering, patterning, thin films, surface preparation, and bonding. The second edition features expanded sections on MEMS and microfluidics, new chapters on polymer and glass microprocessing, and serial processing techniques. It includes 200 new and 200 modified figures, enhanced coverage of imprinting techniques, process integration, and the economics of microfabrication. Additionally, there are 300 homework exercises that encompass conceptual thinking, order of magnitude estimates, standard calculations, and device design and process analysis problems, with solutions available on a complementary website. The book is structured to clearly differentiate between basic principles and advanced material, making it a valuable resource for senior undergraduate and beginning graduate students, as well as a practical desk reference for electrical engineers, materials scientists, chemists, and physicists.