Maurizio Dapor Knihy

Focusing on the fundamental role of electron beam interactions with solid targets, this book delves into theoretical investigations using the Monte Carlo method to simulate electron penetration. It explores probabilistic laws governing elastic and inelastic cross-sections and examines various aspects such as backscattering coefficients, absorption, and secondary electron emission. By comparing theoretical insights, computational simulations, and experimental data, the book aims to provide a comprehensive understanding of interaction processes in materials science.

Focusing on the interaction of charged particles with condensed matter, the book covers both elastic and inelastic scattering phenomena. It explains computational methods for calculating cross sections in a clear and accessible manner. Readers will find comprehensive guidance for developing their own Monte Carlo code to simulate fast particle transport, supported by numerous numerical and experimental examples that enhance understanding and application of the concepts discussed.

The interaction of an electron beam with a solid target has been a focus of study since the early 20th century, gaining significant attention from 1960 onwards due to its importance in various fields such as scanning electron microscopy, electron-probe microanalysis, Auger electron spectroscopy, electron-beam lithography, and radiation damage. Theoretical investigations often utilize the Monte Carlo method, a numerical approach that employs random numbers to solve mathematical problems, making it particularly effective for studying electron penetration in materials. The probabilistic laws governing individual electron interactions with target atoms are well established, allowing for the computation of macroscopic interaction characteristics by simulating numerous real trajectories and averaging the results. This work aims to explore the probabilistic laws of individual electron interactions, including elastic and inelastic cross-sections, and to examine specific aspects of electron interactions such as backscattering coefficients, absorption, and secondary electron emission. Additionally, it introduces the Monte Carlo method and its applications for computing macroscopic interaction characteristics, while comparing theoretical predictions, computational simulations, and experimental data for a comprehensive understanding.

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