Kniha momentálne nie je na sklade
Viac o knihe
The 14 papers in this volume cover topics such as the background to this approach and up-dated status; design and concepts of relevant cluster tools equipment; specific process modules such as deposition chambers (CVD, RTCVD, UVCVD) annealing or etching reactors; and standardization efforts.
Nákup knihy
Single chamber processing, Yves I. Nissim
- Jazyk
- Rok vydania
- 1993
Akonáhle sa objaví, pošleme e-mail.
Platobné metódy
Nikto zatiaľ neohodnotil.