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Viac o knihe
Focusing on the latest advancements in optical sensors, the book explores their application in precision nanometrology for measuring angle and displacement. It details scanning-type measuring systems designed for analyzing surface forms and stage motions, complemented by algorithms and experimental data that enhance understanding and implementation.
Nákup knihy
Precision Nanometrology, Wei Gao
- Jazyk
- Rok vydania
- 2014
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