Foundation of MEMS

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Designed for advanced undergraduate and beginning graduate students, this textbook serves as a comprehensive resource for courses in Micro-Electro-Mechanical Systems (MEMS). It addresses essential concepts, principles, and applications of MEMS technology, making it suitable for professionals seeking to deepen their understanding in this field. The content emphasizes both theoretical foundations and practical implementations, catering to a diverse audience interested in the intricacies of MEMS.